Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle

This paper presents a novel hybrid control algorithm for the conventional capacitive MEMS accelerometer. This scheme is realized by adding a backstepping controller to a conventional PID closed loop system to achieve higher stability and higher dynamic range and to prevent pull-in phenomena by preventing linger displacement from passing a maximum preset value. The analysis of convergence and resolution show that while the proposed control scheme satisfies these criteria it also keeps resolution performance better than what is normally obtained in conventional PID controllers. The performance of the proposed hybrid controller investigated here is validated by computer simulation.