DocumentCode
3326640
Title
Gated in-situ grown carbon nanotube field emitter arrays
Author
Hsu, David S.Y. ; Shaw, J.L.
Author_Institution
Naval Res. Lab., Washington, DC, USA
fYear
2001
fDate
2001
Firstpage
51
Lastpage
52
Abstract
We fabricated two different configurations of integrally gated carbon nanotube (cNT) field emitter arrays, one with cNTs grown on the tips of gated silicon posts and the other with cNTs grown inside open gated apertures. We present emission data from both types
Keywords
carbon nanotubes; electron field emission; vacuum microelectronics; C; gated carbon nanotube field emitter array; in situ growth; Anodes; Apertures; Carbon nanotubes; Diodes; Fabrication; Field emitter arrays; Gases; Laboratories; Silicon; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location
Davis, CA
Print_ISBN
0-7803-7197-6
Type
conf
DOI
10.1109/IVMC.2001.939648
Filename
939648
Link To Document