Title :
The utmost abilities of alumina technology on formation of miniature active and passive elements of VICs [vacuum microelectronics]
Author :
Mukhurov, N.I. ; Galdetskiy, A.V. ; Gasenkova, I.V. ; Kotova, I.F. ; Ryzhikov, I.A.
Author_Institution :
Inst. of Electron., Acad. of Sci., Minsk, Belarus
Abstract :
Test structures of thin-film (0.1 μm) Mo and W-Re strip systems on anodic alumina substrates have been investigated to form blade field emitters for a microwave minitron. It is possible to fabricate elements of less than 0.2 μm in size on these substrates with surface cleanness class of 10 to 11 in apparatus based on a scanning tunnelling microscope
Keywords :
alumina; integrated circuit testing; microwave devices; scanning tunnelling microscopy; vacuum microelectronics; 0.1 micron; 0.2 micron; Al2O3; Mo-Al2O3; VICs; WRe-Al2O3; alumina technology; anodic alumina substrates; blade field emitters; element size; microwave minitron; miniature active elements; miniature passive elements; scanning tunnelling microscope-based apparatus; surface cleanness class; test structures; thin-film Mo strips; thin-film W-Re strips; vacuum ICs; Atomic force microscopy; Blades; Electronic equipment testing; Lithography; Rough surfaces; Substrates; Surface morphology; Surface roughness; Surface topography; System testing;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939708
