Title :
Experimental study on a VME pressure sensor
Author :
Xia, S. ; Chen, S.
Author_Institution :
Inst. of Electron., Chinese Acad. of Sci., Beijing, China
Abstract :
In spite of its many advantages, the obstacles that baffled the rapid development and application of the VME pressure sensor have been the difficulties in its fabrication, especially in the sensor package. The authors of this paper have made systematic research on VME pressure sensors. This article presents the authors´ recent research and achievement on VME pressure sensors. A new VME pressure sensor has been successfully developed and its properties have been tested. Experimental studies and measurement results are reported, for the first time, revealing the characteristics of the sensor output current varying with applied pressure under different anode voltages
Keywords :
microsensors; pressure sensors; vacuum microelectronics; VME pressure sensor; Anodes; Current measurement; Fabrication; Packaging; Pressure measurement; Sensor phenomena and characterization; Sensor systems; Testing; Time measurement; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939722