Development of in-situ laser vacuum annealing and sealing processes for an application to field emission displays

Author

Song, B.G. ; Cha, S.N. ; Park, N.S. ; Lee, N.S. ; Kim, J.M. ; Shin, J.S. ; Lee, C.H. ; Kim, C.O. ; Hong, J.P.

Author_Institution

FED Project Team, Samsung Adv. Inst. of Technol., Suwon, South Korea

fYear

2001

fDate

2001

Firstpage

219

Lastpage

220

Abstract

A laser irradiation technique is increasingly becoming one of viable candidates for in-situ and in-line packaging of field emission displays (FED) in their near-future mass production. A high power laser was used for laser annealing as well as laser sealing processes. The former is to clean field emitter arrays (FEAs) and the latter is to melt glass frit between two glass plates by an local irradiation of a laser beam along the edges of a panel. In addition, seal-capping and getter activation processes were sequentially carried out while not breaking a vacuum inside a FED panel

Keywords

field emission displays; laser beam annealing; packaging; seals (stoppers); cleaning; field emission display; field emitter array; getter activation; glass frit melting; glass plate; in-line packaging; in-situ process; laser irradiation; laser sealing; laser vacuum annealing; mass production; seal-capping; vacuum panel; Annealing; Field emitter arrays; Flat panel displays; Gettering; Glass; Laser beams; Mass production; Optical arrays; Packaging; Power lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International

Conference_Location

Davis, CA

Print_ISBN

0-7803-7197-6

Type

conf

DOI

10.1109/IVMC.2001.939732

Filename

939732