Title :
Development of robust microvalves for large flow rate robust hydraulic actuators
Author_Institution :
Mech., Mater. & Aerosp. Eng. Dept., Univ. of Central Florida, Orlando, FL, USA
Abstract :
A robust microvalve has been designed, fabricated and tested for large flow rate robust hydraulic actuators. The objectives for the hydraulic actuator, same for the microvalve, are challenging for MEMS based microvalves with large flow rate (10 cc/sec), large pressure support ability (up to 10 MPa) and able to operate at frequency (10 kHz). The designed microvalve meets all these requirements based on the simulation results with micro reinforced valve flap and a valve stopper. The flow rate of the microvalve tested is about 20 cc/sec under pressure of 50 psi and no damages identified during repeating tests.
Keywords :
microactuators; microvalves; 10 MPa; 10 kHz; 50 psi; MEMS based microvalve; large flow rate robust hydraulic actuators; large pressure support ability; robust microvalves; Aerospace engineering; Aerospace materials; Frequency; Hydraulic actuators; Micromechanical devices; Microvalves; Piezoelectric actuators; Robustness; Testing; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189696
