Title :
Hydrocarbon nanoparticle formation in C2H2/AR discharge plasma
Author :
Schweigert, Irina ; Ariskin, Dmitry
Author_Institution :
Inst. of Theor. & Appl. Mech., SB RAS, Novosibirsk, Russia
Abstract :
The formation and growth of hydrocarbon nanoparticles in a reactive plasma is the result of a complex chemistry, a chemistry that itself strongly depends on the plasma parameters. Recently this phenomenon is not clear yet. In this work, first we developed a hybrid model for simulations of the 13.56 MHz discharge in a C2H2/Ar mixture.
Keywords :
argon; discharges (electric); plasma chemistry; plasma kinetic theory; plasma simulation; C2H2/AR discharge plasma; PIC-MCC algorithm; acetylene; argon discharge; complex chemistry; electron motion; hydrocarbon nanoparticle formation; kinetic simulations; reactive plasma; Argon; Chemicals; Electrons; Hydrocarbons; Kinetic theory; Nanoparticles; Plasma chemistry; Plasma density; Plasma properties; Plasma simulation;
Conference_Titel :
Plasma Science, 2010 Abstracts IEEE International Conference on
Conference_Location :
Norfolk, VA
Print_ISBN :
978-1-4244-5474-7
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2010.5534177