Novel high resolution optical scanner actuated by aerosol deposited PZT films

Author

Asai, Nobuaki ; Matsuda, Riki ; Watanabe, Mitsuyoshi ; Takayama, Haruhisa ; Yamada, Shoji ; Mase, Atsuhiro ; Shikida, Mitsuhiro ; Sato, Karuo ; Lebedev, Maxim ; Akedo, Jun

Author_Institution

Brother Industries, Ltd, Nagoya, Japan

fYear

2003

fDate

19-23 Jan. 2003

Firstpage

247

Lastpage

250

Abstract

A performance of a new type of optical 1-D scanner with high resolution for a raster scanning laser display was investigated. PZT actuators were integrated on the scanning device for the mirror driving by using aerosol deposition method. We realized the high resonant frequency of 33.4 kHz and the large scan angle (peak to peak value) of more than 25 degree. This result means that the scanner is capable to the application of SVGA (800×600) high-resolution-display or more.

Keywords

CVD coatings; lead compounds; micro-optics; mirrors; optical scanners; piezoelectric actuators; piezoelectric thin films; 33.4 kHz; PZT; PZT actuators; PbZrO3TiO3; SVGA high-resolution-display; aerosol deposited PZT films; aerosol deposition method; high resolution optical scanner; high resonant frequency; large scan angle; raster scanning laser display; Actuators; Aerosols; Displays; Equations; High speed optical techniques; Micromechanical devices; Mirrors; Optical beams; Optical films; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-7744-3

Type

conf

DOI

10.1109/MEMSYS.2003.1189732

Filename

1189732