Development of micro channel array with detecting electrodes for electrophysiological biomedical sensor

This paper presents developments of micro channel array with detecting microelectrodes (hereafter MCA) for electrophysiological biomedical sensors. Electrophysiological biomedical sensors for drug screening require higher-throughput of testing. MCA corresponding to a large number of objective cells have been developed to satisfy this demand. Based on successful results of the first design of MCA with 100 channels in F 440 μm area, several improvements have been carried out to provide higher performances. The latest MCA with isolated detecting electrodes for the individual detection of cell signals will be also reported.