Title :
A new higher-pressure sensor measured by heat transfer with two heaters
Author :
Ohji, Hiroshi ; Yutani, Naoki ; Taruya, Masaaki ; Koshimizu, Akira ; Tsutsumi, Kazuhiko ; Fukami, Tatsuya
Author_Institution :
Adv. Technol. R&D Center, Mitsubishi Electr. Corp., Amagasaki, Japan
Abstract :
This paper presents a newly developed pressure sensor. The principle of its pressure measurement is based on heat transfer from a heat source fabricated on a sensor element to a metal diaphragm, to which pressure is applied. The lower linearity errors less than ±1.0%FS without any compensation and the lower consumption power, 10 mW, are achieved by using a reference heater and an optimization of the sensor element.
Keywords :
heat transfer; microsensors; pressure sensors; 10 mW; heat transfer; higher-pressure sensor; lower consumption power; lower linearity errors; two heaters; Heat sinks; Heat transfer; Pollution measurement; Pressure measurement; Resistors; Silicon; Space heating; Temperature sensors; Thermal conductivity; Thermal sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189795
