DocumentCode
3333493
Title
Plasma polymerized composite thin films produced by double discharges technique
Author
Goktas, H. ; Demircioglu, Z. ; Gunes, T. ; Kaya, I.
Author_Institution
Phys. Dept., Canakkale Onsekiz Mart Univ., Canakkale, Turkey
fYear
2010
fDate
20-24 June 2010
Firstpage
1
Lastpage
1
Abstract
We report herein the characterizations of thiophene and pyrrole composite thin films synthesized by using a plasma based electron beam generator which has a fast filamentary discharge formed from the superposition of an ordinary low-pressure dc glow discharge and high-current pulsed one. Glass and ITO (indium tin oxide) substrates were coated at a pressure of 1 mbar, 19 kV pulsed and 2 kV dc potential. The substrates were located at different regions in the reactor to evaluate the influence of the position on the molecular structure of the obtained thin films. To our knowledge, such composite thin films are synthesized for the first time by such technique.
Keywords
glow discharges; plasma diagnostics; plasma materials processing; polymers; thin films; dc glow discharge; double discharges technique; electron beam generator; indium tin oxide; molecular structure; plasma polymerized composite thin films; pyrrole; thiophene; Character generation; DC generators; Electron beams; Fault location; Glow discharges; Indium tin oxide; Plasmas; Polymer films; Pulse generation; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2010 Abstracts IEEE International Conference on
Conference_Location
Norfolk, VA
ISSN
0730-9244
Print_ISBN
978-1-4244-5474-7
Electronic_ISBN
0730-9244
Type
conf
DOI
10.1109/PLASMA.2010.5534244
Filename
5534244
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