• DocumentCode
    3333658
  • Title

    Micro electret power generator

  • Author

    Boland, Justin ; Chao, Yuan-Heng ; Suzuki, Yuji ; Tai, Y.C.

  • Author_Institution
    Dept. of Electr. Eng., California Inst. of Technol., Pasadena, CA, USA
  • fYear
    2003
  • fDate
    19-23 Jan. 2003
  • Firstpage
    538
  • Lastpage
    541
  • Abstract
    We present the first micromachined rotational electret power generator, linearized theoretical model of electret power generation, and novel method to produce uniformly charged electret. We also improved our previously developed (1996, 1999) thin film Teflon AF 1601-S electret technology with respect to dielectric thickness, charge uniformity, and processability. In demonstration, our prototype power generator successfully generated > 25μW with electret thickness of 9μm, effective charge density of -2.8×10-4C/m2, and rotational speed of 4170RPM.
  • Keywords
    electrets; electric generators; small electric machines; 25 muW; 9 micron; charge uniformity; dielectric thickness; linearized theoretical model; micro electret power generator; micromachined rotational electret power generator; processability; thin film Teflon AF 1601-S electret technology; Aluminum; Chaos; Dielectric thin films; Electrets; Micromechanical devices; Power generation; Rotors; Rough surfaces; Stators; Surface roughness;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-7744-3
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2003.1189805
  • Filename
    1189805
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3333658