Surface micromachined glass and polysilicon microchannels using MUMPs

Author

Lee, Ki Bang ; Lin, Liwei

Author_Institution

Dept. of Mech. Eng., Univ. of California, Berkeley, CA, USA

fYear

2003

fDate

19-23 Jan. 2003

Firstpage

578

Lastpage

581

Abstract

MUMPs (Multi-User MEMS Process) based, surface micromachined glass and polysilicon microchannels are fabricated by means of surface micromachining. The prototype glass microchannels are made of a 0.75 μm-thick PSG2 layer on top with cross section of 70 μm in width and 4 μm in height. The polysilicon microchannel are made of a 2 μm-thick poly I layer with a cross section of 7 μm in width and 2 μm in height. Both microchannels have been tested to transport and contain water by means of surface tension force. Because these microchannels are fabricated strictly from the foundry-based micromachining process, they present opportunities for economical prototyping process and provide great potential to be integrated with other micromachined microfluidic systems using foundry-based services for device applications, such as DNA chip and lab-on-a-chip.

Keywords

microfluidics; micromachining; micromechanical devices; phosphosilicate glasses; silicon; 0.75 micron; 2 micron; 4 micron; 7 micron; 70 micron; DNA chip; MUMPs; Multi-User MEMS Process; PSG2 layer; Si; economical prototyping process; foundry-based micromachining process; lab-on-a-chip; micromachined microfluidic systems; polysilicon microchannels; surface micromachined glass microchannels; surface micromachining; surface tension force; DNA; Glass; Lab-on-a-chip; Microchannel; Microfluidics; Micromachining; Micromechanical devices; Prototypes; Surface tension; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-7744-3

Type

conf

DOI

10.1109/MEMSYS.2003.1189815

Filename

1189815