Title :
A general description of active resonance spectroscopic diagnostic tools for technical plasmas
Author :
Lapke, M. ; Oberrath, J. ; Mussenbrock, T. ; Brinkmann, R.P.
Author_Institution :
Center for Plasma Sci. & Technol., Ruhr-Univ. Bochum, Bochum, Germany
Abstract :
This contribution investigates resonance spectroscopic plasma diagnostic. The idea is simple - the frequency dependence of the power absorption is displayed via a rf-signal fed to an antenna. Using the absorption spectrum, plasma parameter like the electron density or electron temperature are calculated. Starting five decades ago numerous concepts based on this idea have been developed as a promising concept for plasma diagnostics in an industrial setting - which means that the proposed methods are robust, calibration free, and economical, and can be used for ideal and reactive plasmas alike.
Keywords :
antennas in plasma; plasma density; plasma diagnostics; plasma temperature; absorption spectrum; active resonance spectroscopic diagnostic; electron density; electron temperature; plasma diagnostics; power absorption; radiofrequency-signal; reactive plasma; Absorption; Electrons; Frequency dependence; Plasma applications; Plasma density; Plasma diagnostics; Plasma displays; Plasma temperature; Resonance; Spectroscopy;
Conference_Titel :
Plasma Science, 2010 Abstracts IEEE International Conference on
Conference_Location :
Norfolk, VA
Print_ISBN :
978-1-4244-5474-7
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2010.5534407
