DocumentCode :
3335873
Title :
Time-resolved plasma properties and eedfs from a rapidly swept 1-MHz Langmuir probe
Author :
Lobbia, R.B. ; Gallimore, A.D.
Author_Institution :
Univ. of Michigan, Ann Arbor, MI, USA
fYear :
2010
fDate :
20-24 June 2010
Firstpage :
1
Lastpage :
1
Abstract :
Summary form only given. Using direct back-to-back high-speed swept Langmuir probe biasing and current measurement, the plasma properties of electron density, electron temperature, plasma potential, floating potential, and the electron energy distribution function are all acquired at a rate of 1-MHz for seamless records in excess of 1-sec. A unique high-speed dual Langmuir probe configuration, consisting of a single Langmuir probe (exposed to plasma) and a null probe (insulated from plasma), enables compensation of the rapidly swept probe signals, thereby permitting probe bias sweep rates in excess of 1-MHz. The time-resolved EEDF data presented are unique from the vast majority of previously published so-called "time-resolved EEDF" data that are actually acquired through phase-averaging and reconstruction of I-V space data (an approach that can only capture one cycle of a periodic plasma process). Thus, the presented approach and data accurately capture the detailed plasma properties (including the EEDF via the Druyvesteyn method) of broadband turbulent plasma behavior inherent to many common laboratory plasmas that exhibit non-quiescent discharges.
Keywords :
Langmuir probes; discharges (electric); plasma density; plasma temperature; plasma turbulence; Druyvesteyn method; back-to-back high-speed swept Langmuir probe; broadband turbulent plasma behavior; electron density; electron energy distribution function; electron temperature; floating potential; frequency 1 MHz; nonquiescent discharge; periodic plasma process; plasma potential; probe bias sweep rates; time-resolved plasma properties; Current measurement; Distribution functions; Electrons; Insulation; Plasma density; Plasma measurements; Plasma properties; Plasma temperature; Probes; Temperature distribution;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 2010 Abstracts IEEE International Conference on
Conference_Location :
Norfolk, VA
ISSN :
0730-9244
Print_ISBN :
978-1-4244-5474-7
Electronic_ISBN :
0730-9244
Type :
conf
DOI :
10.1109/PLASMA.2010.5534415
Filename :
5534415
Link To Document :
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