• DocumentCode
    3336240
  • Title

    Growth and applications of nanotube films

  • Author

    Kuttel, O.M. ; Dessibourg, O. ; Groning, O. ; Maillard, E. ; Nilsson, L.O. ; Schlapbach, L.

  • Author_Institution
    Inst. de Phys., Fribourg Univ., Switzerland
  • fYear
    1999
  • fDate
    23-23 June 1999
  • Firstpage
    120
  • Lastpage
    123
  • Abstract
    We have presented a method to produce carbon nanotube films by microwave plasma enhanced CVD deposition and have characterised their electron field emission by different techniques. First devices made out of these films reveal that even though the emission is understood in terms of the underlying physics more effort has to be put in the technology to get uniform emitting films, with a narrow field enhancement factor distribution and a controlled internal resistor being stable in time. By using a hot filament reactor we were able to uniformly cover 4" wafers with nanotubes. Structured and patterned nanotube films have been grown and characterised with respect to their field emission properties and their use for cold electron sources.
  • Keywords
    carbon nanotubes; electron field emission; plasma CVD coatings; C; carbon nanotube film; cold electron source; electron field emission; hot filament reactor; microwave plasma enhanced CVD deposition; Carbon nanotubes; Electron emission; Electron sources; Inductors; Microwave devices; Microwave theory and techniques; Physics; Plasma applications; Plasma devices; Resistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference Digest, 1999 57th Annual
  • Conference_Location
    Santa Barbara, CA, USA
  • Print_ISBN
    0-7803-5170-3
  • Type

    conf

  • DOI
    10.1109/DRC.1999.806344
  • Filename
    806344