• DocumentCode
    3338701
  • Title

    Towards 100 nm resolution X-Ray tomography

  • Author

    Bruyndonckx, P. ; Sasov, A. ; Pauwels, B. ; Liu, X.

  • Author_Institution
    SkyScan N.V., Belgium
  • fYear
    2009
  • fDate
    Oct. 24 2009-Nov. 1 2009
  • Firstpage
    1335
  • Lastpage
    1338
  • Abstract
    Using a nano-focus x-ray source we have been able to visualize structures down to 150 nm in x-ray projection images. Because of their unlimited depth of focus, these sources don´t restrict the specimen size in case of 3D tomographic imaging. Simulation studies have shown that optimization of the detector response curve and switching from a reflective x-ray target to a transmission target might allow us to reach sub-100 nm resolutions.
  • Keywords
    X-ray detection; X-ray imaging; X-ray optics; tomography; X-ray projection images; depth of focus; detector response curve optimisation; nanofocus X-ray source; nanometer resolution X-ray tomography; transmission X-ray target; Nuclear and plasma sciences; X-ray tomography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nuclear Science Symposium Conference Record (NSS/MIC), 2009 IEEE
  • Conference_Location
    Orlando, FL
  • ISSN
    1095-7863
  • Print_ISBN
    978-1-4244-3961-4
  • Electronic_ISBN
    1095-7863
  • Type

    conf

  • DOI
    10.1109/NSSMIC.2009.5402349
  • Filename
    5402349