• DocumentCode
    3343741
  • Title

    GaN nanocolumus on Si(III) grown by molecular beam epitaxy

  • Author

    Calarco, R. ; Marso, M. ; Meijers, R. ; Richter, T. ; Aykanat, A.I. ; Stoica, T. ; Luth, H.

  • fYear
    2004
  • fDate
    17-21 Oct. 2004
  • Firstpage
    9
  • Lastpage
    12
  • Abstract
    GaN nanocolumns are reproducibly grown by plasma-assisted molecular beam epitaxy on Si(111). The nanocolumn density and diameter, 20-150 nm, are controlled by means of the III/V ratio. The nanocolumns grow parallel to the {J 11] direction of the Sf substrate. The columns have been transferred to a Si(100) substrate covered with a layer of 300nm SiD2. Single nanowire devices have been fabricated using finger shaped electrical contacts (TiIAu) obtained by e-beam patterning technique. The electrical transport properties of the resulting metal-semiconductor-metal nanostructures are analyzed by means of currentvoltage measurements in dark and under UV-illumination.
  • Keywords
    Epitaxial growth; Gallium nitride; III-V semiconductor materials; Molecular beam epitaxial growth; Nanoscale devices; Plasma density; Plasma temperature; Semiconductor nanostructures; Substrates; Surface morphology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. The Fifth International Conference on
  • Conference_Location
    Smolenice Castle, Slovakia
  • Print_ISBN
    0-7803-8335-7
  • Type

    conf

  • DOI
    10.1109/ASDAM.2004.1441145
  • Filename
    1441145