Discovery and optimization of In-Zn-Sn-O based transparent conductors by combinatorial and pulsed laser deposition approaches

Author

Perkins, J.D. ; del Cueto, J.A. ; Alleman, J.L. ; Warmsingh, C. ; Keyes, B.M. ; Gedvilas, L.M. ; Parilla, P.A. ; Li, X. ; To, E. ; Readey, D.W. ; van Hest, M. ; Ginley, D.S.

Author_Institution

Nat. Renewable Energy Lab., Golden, CO, USA

fYear

2002

fDate

19-24 May 2002

Firstpage

1126

Lastpage

1129

Abstract

There is an expanding interest in the development of new transparent conducting oxides (TCOs) for a host of applications including photovoltaics, flat panel displays, and low-e and electrochromic windows. In this paper, we discuss the application of compositional spread combinatorial techniques for the initial characterization of the ZnO-SnO₂ TCO tie line. Local maxima in the composition dependence of the conductivity were found for Zn/Sn - 2:1 (Zn₂SnO₄) and Zn/Sn - 1:1 (ZnSnO₃). Interesting compositions were further explored by pulsed laser deposition.

Keywords

electrical conductivity; indium compounds; pulsed laser deposition; semiconductor growth; semiconductor thin films; tin compounds; transparency; zinc compounds; In-Zn-Sn-O; In-Zn-Sn-O based transparent conductors; ZnO-SnO₂; combinatorial deposition; composition dependence; electrochromic windows; flat panel displays; low-e; photovoltaics; pulsed laser deposition; Conductivity; Conductors; Libraries; Optical films; Optical pulses; Photovoltaic cells; Pulsed laser deposition; Radio frequency; Tin; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Photovoltaic Specialists Conference, 2002. Conference Record of the Twenty-Ninth IEEE

ISSN

1060-8371

Print_ISBN

0-7803-7471-1

Type

conf

DOI

10.1109/PVSC.2002.1190804

Filename

1190804