Title :
Design, fabrication, and testing of a piezoelectrically driven high flow rate micro-pump
Author :
Saggere, L. ; Hagood, N.W. ; Roberts, D.C. ; Li, H.Q. ; Steyn, J.L. ; Turner, K. ; Carretero, J.A. ; Yaglioglu, O. ; Su, Y.-H. ; Mlcak, R. ; Spearing, S.M. ; Breuer, K.S. ; Schmidt, M.A.
Author_Institution :
Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
Towards the development of novel class of miniature transducers with very high specific power, a high frequency and high flow rate hydraulic micro-pump with passive check valves was fabricated and tested. The micro-pump features a small piezoelectric (PZT-5H/PZN-PT) cylinder integrated into micromachined silicon and pyrex chips. The piezoelectric cylinder bonded to a thick circular disk serves as the drive element in the pump chamber, and two axisymmetric silicon membranes with hollow annular bosses serve as system check valves. Using silicone oil as the working fluid, the performance of the micro-pump was tested by varying voltages from 0 to 1600 V and frequencies from 1 kHz to 12 kHz. The micro-pump with PZT-5H element achieved a high flow rate of 2.5 ml/min at 1200 V and 4.5 kHz
Keywords :
lead compounds; micropumps; piezoelectric transducers; 0 to 1600 V; 1 to 12 kHz; PZN-PT; PZT; PZT-5H; PbZnO3NbO3-PbTiO3; PbZrO3TiO3; axisymmetric silicon membrane; circular disk; drive element; flow rate; hydraulic micro-pump; micro-hydraulic transducer; micromachined silicon chip; passive check valve; piezoelectric cylinder; pyrex chip; silicone oil; Bonding; Drives; Fabrication; Frequency; Micropumps; Piezoelectric transducers; Pumps; Silicon; Testing; Valves;
Conference_Titel :
Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-5940-2
DOI :
10.1109/ISAF.2000.941559
