DocumentCode
3352147
Title
Study on preparation of Pb(Zr,Ti)O3 thin-films on TiNi SMA substrates using sol-gel techniques
Author
Li, Xianshan ; Cheng, Jinrong ; Liu, Qingfeng ; Zhang, Jicheng ; Meng, Zhongyan
Author_Institution
Sch. of Mater. Sci. & Technol., Shanghai Univ., China
fYear
1996
fDate
25-30 Sep 1996
Firstpage
695
Lastpage
699
Abstract
The authors investigate piezoelectric Pb(Zr,Ti)O3 thin films on shape memory alloy TiNi substrates prepared by a sol-gel process. Lead acetate, zirconium isopropoxide and titanium n-butyloxide dissolved respectively in a solvent were mixed under nitrogen to form a precursor solution. The resultant solution was spun onto the TiNi SMA substrates at 2000 rpm for 30s. The amorphous thin films were crystallized by annealing in air. It was found that the crack-free PZT thin films displayed good mechanical bonding with the TiNi substrates
Keywords
annealing; ferroelectric thin films; intelligent materials; lead compounds; piezoceramics; piezoelectric thin films; shape memory effects; sol-gel processing; 30 s; PZT; PbZrO3TiO3; TiNi; amorphous thin films; annealing; crack-free PZT thin films; crystallization; ferroelectric films; good mechanical bonding; intelligent materials; lead acetate; piezoelectric Pb(Zr,Ti)O3 thin films; precursor solution; shape memory alloy TiNi substrates; sol-gel process; spin coating; titanium n-butyloxide; zirconium isopropoxide; Amorphous materials; Crystallization; Lead; Nitrogen; Piezoelectric films; Shape memory alloys; Solvents; Titanium; Transistors; Zirconium;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrets, 1996. (ISE 9), 9th International Symposium on
Conference_Location
Shanghai
Print_ISBN
0-7803-2695-4
Type
conf
DOI
10.1109/ISE.1996.578193
Filename
578193
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