Kinetic study of a novel trans-scale precision positioning stage based on stick-slip effect

Author

Bowen Zhong ; Zhenhua Wang ; Liguo Chen ; Lining Sun

Author_Institution

Robot Res. Inst., Harbin Inst. of Technol., Harbin, China

Volume

1

fYear

2011

fDate

12-14 Aug. 2011

Firstpage

373

Lastpage

376

Abstract

In this paper, the stick-slip effect was introduced and a prototype of trans-scale precision positioning stage based on the stick-slip effect was designed. The electro-mechanical conversion model of PZT actuator was built by the capacitance charge-discharge formula and the step model of PZT actuator. According to the structure of the prototype, the second-order oscillation model of inertial mass was also deduced and simulate in Matlab-Simulink software. Base on kinetic experiment, the simulation results of second-order oscillation model of inertial mass was validated by the experiment results. The oscillation model of inertial mass well reflects the oscillation phenomenon in each step of stick-slip driving and improves the accuracy of the input displacement signal in the modeling of stick-slip driving compared with only using the step model of PZT actuator.

Keywords

actuators; nanotechnology; oscillations; position control; Matlab-Simulink software; PZT; PZT actuator; capacitance charge-discharge formula; electro-mechanical conversion model; kinetics; nanometer positioning technology; nanotechnology; oscillation model; second-order oscillation model; stick-slip effect; trans-scale precision positioning; Actuators; Electric fields; Fasteners; Force; Kinetic theory; Mathematical model; Oscillators; Kinetic; Stick-slip; Trans-scale;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic and Mechanical Engineering and Information Technology (EMEIT), 2011 International Conference on

Conference_Location

Harbin, Heilongjiang, China

Print_ISBN

978-1-61284-087-1

Type

conf

DOI

10.1109/EMEIT.2011.6022955

Filename

6022955