DocumentCode
3353025
Title
GaAs On Si By Low Temperature Laser Chemical Vapor Deposition
Author
Ku, J.K. ; Choi, W.L. ; In, B.W. ; Chung, J.W. ; Kwon, O.D.
Author_Institution
Pohang Institute of Science and Technology
fYear
1990
fDate
4-9 Nov 1990
Firstpage
542
Lastpage
543
Keywords
Chemical lasers; Chemical technology; Chemical vapor deposition; Electrons; Gallium arsenide; Laser theory; Semiconductor films; Temperature; X-ray lasers; X-ray scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN
0-87942-550-4
Type
conf
DOI
10.1109/LEOS.1990.690671
Filename
690671
Link To Document