Enhancement of electron emission efficiency and stability of molybdenum field emitter array by diamond-like carbon coating

Author

Jung, J.H. ; Ju, B.K. ; Lee, Y.H. ; Oh, M.H. ; Jang, J.

Author_Institution

Div. of Electron. & Inf. Technol., KIST, Seoul, South Korea

fYear

1996

fDate

8-11 Dec. 1996

Firstpage

293

Lastpage

296

Abstract

We have studied the enhancement of electron emission by diamond-like carbon (DLC) coating on Mo field emitter arrays by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 V to 30 V by 20 nm DLC coating and maximum emission current was increased from 166 /spl mu/A to 831 /spl mu/A. Also the gate voltage required to get the anode current of 0.1 (/spl mu/A/emitter) decreases from 77 V to 48 V. Furthermore, the emission current from DLC coated Mo FEAs is more stable than that of non-coated Mo FEAs.

Keywords

carbon; electron field emission; molybdenum; plasma CVD coatings; vacuum microelectronics; 30 V; 48 V; 831 muA; C; Mo; diamond-like carbon coating; efficiency; electron emission; emission current; gate voltage; layer-by-layer technique; molybdenum field emitter array; plasma enhanced chemical vapor deposition; stability; turn-on voltage; Anodes; Bonding; Coatings; Diamond-like carbon; Electron emission; Field emitter arrays; Plasma chemistry; Plasma measurements; Plasma temperature; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1996. IEDM '96., International

Conference_Location

San Francisco, CA, USA

ISSN

0163-1918

Print_ISBN

0-7803-3393-4

Type

conf

DOI

10.1109/IEDM.1996.553587

Filename

553587