DocumentCode
3356096
Title
Observation And Characterization Of Defects In Semiconductors Due To Crystal Process And Ion Implantation By Light Scattering Techniques
Author
Ogawa, Tomoya
Author_Institution
Gakushuin University
fYear
1990
fDate
4-9 Nov 1990
Firstpage
592
Lastpage
594
Keywords
Crystals; Gallium arsenide; Grain boundaries; Infrared detectors; Laser beams; Lenses; Light scattering; Optical scattering; Surface emitting lasers; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN
0-87942-550-4
Type
conf
DOI
10.1109/LEOS.1990.690690
Filename
690690
Link To Document