Title :
Observation And Characterization Of Defects In Semiconductors Due To Crystal Process And Ion Implantation By Light Scattering Techniques
Author_Institution :
Gakushuin University
Keywords :
Crystals; Gallium arsenide; Grain boundaries; Infrared detectors; Laser beams; Lenses; Light scattering; Optical scattering; Surface emitting lasers; Thermal stresses;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN :
0-87942-550-4
DOI :
10.1109/LEOS.1990.690690