DocumentCode
3362435
Title
RF MEMS resonators: Material properties extraction
Author
Nada, Yasseen ; Stoffels, Steve ; Tilmans, Harrie A C ; Hegazi, Emad ; Ragai, Hani F. ; Shaarawi, Amr M.
Author_Institution
American Univ. in Cairo, Cairo, Egypt
fYear
2009
fDate
15-17 Nov. 2009
Firstpage
1
Lastpage
4
Abstract
Analytical formula for the resonance frequencies of circular, square, and hexagonal MEMS resonators are extracted based on the analytical model for extensional vibrations of MEMS resonators. Material properties for the MEMS resonators are then extracted based on the analytical formula. Experimental measurement is done to extract the material properties of single crystal silicon MEMS resonators to verify the extraction method.
Keywords
micromechanical resonators; microwave materials; RF MEMS resonators; Analytical models; Equations; Material properties; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Resonance; Resonant frequency; Resonator filters; Vibrations; Extensional Vibration; Material Properties; Micro-Electro-Mechanical Resonator; Modeling Microsystems; RF MEMS;
fLanguage
English
Publisher
ieee
Conference_Titel
Design and Test Workshop (IDT), 2009 4th International
Conference_Location
Riyadh
Print_ISBN
978-1-4244-5748-9
Type
conf
DOI
10.1109/IDT.2009.5404127
Filename
5404127
Link To Document