Title :
Personal-CIM system to monitor ULSI R&D line for process engineers
Author :
Matsumoto, Shigeru ; Tanimura, Shoichi ; Hirofuji, Yuichi
Author_Institution :
ULSI Process Technol Dev. Centre, Matsushita Electron. Corp., Kyoto, Japan
Abstract :
In this paper, a personal-CIM system to improve the efficiency of experiments on ULSI development in the ULSI R&D line is described. We have developed the personal-CIM system which works in cooperation with a Manufacturing Execution System (MES) in order to reduce the preparation time for an experiment performed by each engineer on semiconductor technology. The personal-CIM system is realized by developing an acceptance agent, an inspection agent and a report agent. As the personal-CIM system acts as a private secretary who examines faithfully variable conditions in the ULSI R&D line instead of each engineer, the engineer gets various information in a timely manner that is needed to prepare for his or her experiment
Keywords :
ULSI; computer integrated manufacturing; computerised monitoring; electronic engineering computing; inspection; integrated circuit manufacture; manufacturing data processing; production engineering computing; ULSI R&D line monitoring; ULSI development; acceptance agent; experiment preparation time reduction; inspection agent; manufacturing execution system; personal-CIM system; process engineers; report agent; semiconductor technology; Computer integrated manufacturing; Inspection; Monitoring; Optimized production technology; Research and development; Semiconductor device manufacture; Ultra large scale integration;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
0-7803-5403-6
DOI :
10.1109/ISSM.1999.808803
