Fabrication of large-area and very uniform two-dimensional sub-micron periodic patterns on 1500 nm range multi-quantum well structures using two-time laser holography

Author

Nakaoka, H. ; Murakami, S. ; Nakano, T. ; Honma, K. ; Utaka, K. ; Nakao, M.

Author_Institution

Sch. of Sci. & Eng., Waseda Univ., Tokyo, Japan

fYear

2004

fDate

31 May-4 June 2004

Firstpage

167

Lastpage

170

Abstract

We have fabricated two- and three-dimensional (2D/3D) sub-micron periodic patterns with periods of 500 nm and 250 nm on 1500 nm-wavelength-range multi-quantum well structures by using two-time laser holography, and successfully observed vertical emission enhancement and also distributed feedback resonance by optical excitations.

Keywords

III-V semiconductors; aluminium compounds; distributed Bragg reflectors; gallium arsenide; holography; indium compounds; infrared spectra; optical fabrication; periodic structures; semiconductor quantum wells; sputter etching; 1500 nm; 250 nm; 500 nm; InAlGaAs-InAlAs; distributed feedback resonance; multiquantum well structures; optical excitations; three-dimensional submicron periodic patterns; two-dimensional submicron periodic patterns; two-time laser holography; vertical emission enhancement; Distributed feedback devices; Holographic optical components; Holography; Laser excitation; Laser feedback; Optical device fabrication; Optical feedback; Periodic structures; Resonance; Stimulated emission;

fLanguage

English

Publisher

ieee

Conference_Titel

Indium Phosphide and Related Materials, 2004. 16th IPRM. 2004 International Conference on

ISSN

1092-8669

Print_ISBN

0-7803-8595-0

Type

conf

DOI

10.1109/ICIPRM.2004.1442637

Filename

1442637