Research on signal processing of micro/nano displacement sensor for piezoelectric actuator based on forward linear prediction wavelet transform

The micro/nano displacement measurement system described in this paper is a sensor that could measure micro/nanometer displacement level and has applications in a PZT actuator. As it is used in precision instruments, the sensor is required not to accommodate much space in order to save the room of measuring device, and what´s more, it can detect the system´s useful signal from the polluted weak signal. Therefore, in this paper we propose a novel signal processing algorithm based on forward linear prediction wavelet transform (DWT-FLP). This method not only uses the fast wavelet transform to achieve signal´s wavelet decomposition and wavelet reconstruction, but also utilizes the FLP to obtain the wavelet coefficients, it can get a good de-noise effect. In the end, some correlative experiments have been made, the results illustrate the validity of the filtering algorithm and the sensor has a higher level of static output, real-time, linearity, low absolute deviation and resolution.