Title :
Scaled nanoelectromechanical (NEM) hybrid devices
Author :
Mizuta, Hiroshi ; Garcia-Ramirez, Mario A. ; Moktadir, Zakaria ; Tsuchiya, Yoshishige ; Sawai, Shunichiro ; Ogi, Jun ; Oda, Shunri
Author_Institution :
Fac. of Phys. & Appl. Sci., Univ. of Southampton, Southampton, UK
Abstract :
This paper overviews recent attempts at co-integrating nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional Si devices in `More-than-Moore´ domain and also explore novel physical principles in `Beyond CMOS´ domain.
Keywords :
CMOS integrated circuits; nanoelectromechanical devices; nanoelectronics; silicon; beyond CMOS domain; more-than-Moore domain; nanoelectronic device; scaled nanoelectromechanical hybrid device; silicon device; CMOS integrated circuits; Logic gates; Nanoelectromechanical systems; Nanoscale devices; Phonons; Quantum dots; Silicon; Beyond CMOS; More than Moore; NEMS; graphene; nanophonon; quantum dot; single-electron transistor; suspended-gate;
Conference_Titel :
IC Design & Technology (ICICDT), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-4244-9019-6
DOI :
10.1109/ICICDT.2011.5783242
