DocumentCode
3370951
Title
Concepts for Carbon Nanotube Sensors
Author
Hierold, Christofer
Author_Institution
ETH Zurich, Zurich
fYear
2007
fDate
10-14 June 2007
Firstpage
5
Lastpage
10
Abstract
This paper reports on concepts for carbon nanotube based sensors for mechanical and chemical quantities. We focus on single-walled carbon nanotubes as "simple" macro molecular functional structures with an option for integration in micro- and nanosystems or MEMS and NEMS and we discuss topics of relevance for fabrication. An extended reference list is included.
Keywords
carbon nanotubes; chemical sensors; microsensors; molecular configurations; nanoelectronics; nanotube devices; MEMS; NEMS; carbon nanotube sensor; chemical quantities; macromolecular functional structures; mechanical quantities; single-walled carbon nanotubes; Carbon nanotubes; Chemical sensors; Electromechanical sensors; Fabrication; Mechanical sensors; Nanoelectromechanical systems; Nanoscale devices; Semiconductivity; Sensor systems; Transducers; NEMS; carbon nanotube; nanosensor; nanotransducer;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300059
Filename
4300059
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