DocumentCode
3371001
Title
Micro Heater with PT-CR Thin Film Thermo-Couple for High Speed Biological Measurements
Author
Gillot, F. ; Arata, H.F. ; Morin, F.O. ; Collard, D. ; Fujita, H.
Author_Institution
Univ. of Tokyo, Tokyo
fYear
2007
fDate
10-14 June 2007
Firstpage
21
Lastpage
23
Abstract
We present a thermal microdevice for high-speed biological measurements that combines a heater for fast temperature shifting (ms range) and a platinum/chromium thin film thermocouple (TFTC) for accurate temperature detection. The device, manufactured on quartz wafer, is successfully employed to measure the time required for unzipping of double strand DNA demonstrating its large capabilities.
Keywords
DNA; bioMEMS; high-speed techniques; thermocouples; thin film devices; DNA; fast temperature shifting; high speed biological measurements; microheater; quartz wafer; temperature detection; thin film thermocouple; Chromium; DNA; Delay; Platinum; Temperature sensors; Thermal sensors; Time measurement; Transistors; Velocity measurement; Wire; Chromium; Micro-heater; Platinum; Thin Film ThermoCouple;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300062
Filename
4300062
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