Realisation of silicon based dielectrics anti-resonant reflecting optical waveguide (ARROW) on InP by photochemical deposition

Author

Sayah, A. ; Nissim, Y.I. ; Toussaere, E.

Author_Institution

Lab. de Bagneux, CNET, Bagneux, France

fYear

1996

fDate

21-25 Apr 1996

Firstpage

315

Lastpage

318

Abstract

A basic dielectric waveguide structure (anti-resonant reflexion optical waveguide) has been studied and fabricated directly on InP. The use of photo-assisted deposition techniques has allowed us to taylor the structural properties of each deposited film. The resulting ARROW structure has many applications including optical directional couplers

Keywords

III-V semiconductors; chemical vapour deposition; dielectric materials; indium compounds; integrated optics; optical directional couplers; optical fabrication; optical films; reflectivity; substrates; ARROW; ARROW structure; InP; anti-resonant reflecting optical waveguide; anti-resonant reflexion optical waveguide; basic dielectric waveguide structure; optical directional couplers; photo-assisted deposition techniques; photochemical deposition; silicon based dielectrics; structural properties; Dielectric materials; Dielectric substrates; Indium phosphide; Lamps; Optical devices; Optical films; Optical refraction; Optical variables control; Optical waveguides; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Indium Phosphide and Related Materials, 1996. IPRM '96., Eighth International Conference on

Conference_Location

Schwabisch-Gmund

Print_ISBN

0-7803-3283-0

Type

conf

DOI

10.1109/ICIPRM.1996.492042

Filename

492042