• DocumentCode
    337168
  • Title

    Estimation of parameters appearing in the level set evolution equation

  • Author

    Berg, Jordan M.

  • Author_Institution
    Dept. of Mech. Eng., Texas Tech. Univ., Lubbock, TX, USA
  • Volume
    2
  • fYear
    1998
  • fDate
    16-18 Dec 1998
  • Firstpage
    2323
  • Abstract
    Level sets are a robust and flexible mathematical framework for the representation of evolving curves and surfaces. At the heart of the level set approach is the PDE governing the evolution of the level set function describing a particular surface. In this paper we address the question of estimating parameters in that PDE, given knowledge of the curve evolution. In practice, this procedure could be useful for formulating low-order models of complex physical phenomena. One possible area of application is thin film manufacturing processes such as etching and deposition. Level set methods are already in use in this area for topography simulation. The parameter estimation approach presented consists of a geometrical measure of the distance between the estimated and measured curves, and an expression for the gradient of that distance with respect to the unknown parameters
  • Keywords
    boundary-value problems; etching; parameter estimation; partial differential equations; thin film devices; curve evolution; etching; level set function; parameter estimation; partial differential equation; surface evolution; thin film; topography simulation; Cost function; Equations; Etching; Heart; Level set; Manufacturing processes; Parameter estimation; Plasma chemistry; Robustness; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Decision and Control, 1998. Proceedings of the 37th IEEE Conference on
  • Conference_Location
    Tampa, FL
  • ISSN
    0191-2216
  • Print_ISBN
    0-7803-4394-8
  • Type

    conf

  • DOI
    10.1109/CDC.1998.758691
  • Filename
    758691