DocumentCode
3372187
Title
Ultra-Thick Optical Components using LF55GN Photosensitive Flexopolymer
Author
Sayah, A. ; Parashar, V.K. ; Gijs, M.A.M.
Author_Institution
Ecole Polytech. Fed. de Lausanne, Lausanne
fYear
2007
fDate
10-14 June 2007
Firstpage
303
Lastpage
306
Abstract
We present the photosensitive flexopolymer LF55GN as a new material for the realisation of thick three-dimensional optical microstructures. Microstructures with a thickness up to 4 millimetres and with an aspect ratio of 10 can be realised using only a single UV exposure step and in a time frame of minutes. No baking process is required for the patterning of the LF55GN flexopolymer. The elastomeric nature of the material allows fabricating thick structures on flexible substrates and forces induced by the deformation of the flexible substrate are easily supported. Combining the casting method and UV lithography, thick optical components such as right-angle prisms with nearly vertical sidewalls and good surface quality are successfully fabricated.
Keywords
casting; optical fabrication; optical polymers; optical prisms; ultraviolet lithography; LF55GN photosensitive flexopolymer; UV lithography; casting method; deformation; flexible substrate; right-angle prisms; surface quality; thick structure fabrication; three-dimensional optical microstructures; ultra-thick optical components; Casting; Glass; Lithography; Microstructure; Optical device fabrication; Optical devices; Optical materials; Optical polymers; Optical refraction; Optical variables control; LF55GN; casting; flexopolymer; prism;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0841-5
Type
conf
DOI
10.1109/SENSOR.2007.4300129
Filename
4300129
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