• DocumentCode
    3372187
  • Title

    Ultra-Thick Optical Components using LF55GN Photosensitive Flexopolymer

  • Author

    Sayah, A. ; Parashar, V.K. ; Gijs, M.A.M.

  • Author_Institution
    Ecole Polytech. Fed. de Lausanne, Lausanne
  • fYear
    2007
  • fDate
    10-14 June 2007
  • Firstpage
    303
  • Lastpage
    306
  • Abstract
    We present the photosensitive flexopolymer LF55GN as a new material for the realisation of thick three-dimensional optical microstructures. Microstructures with a thickness up to 4 millimetres and with an aspect ratio of 10 can be realised using only a single UV exposure step and in a time frame of minutes. No baking process is required for the patterning of the LF55GN flexopolymer. The elastomeric nature of the material allows fabricating thick structures on flexible substrates and forces induced by the deformation of the flexible substrate are easily supported. Combining the casting method and UV lithography, thick optical components such as right-angle prisms with nearly vertical sidewalls and good surface quality are successfully fabricated.
  • Keywords
    casting; optical fabrication; optical polymers; optical prisms; ultraviolet lithography; LF55GN photosensitive flexopolymer; UV lithography; casting method; deformation; flexible substrate; right-angle prisms; surface quality; thick structure fabrication; three-dimensional optical microstructures; ultra-thick optical components; Casting; Glass; Lithography; Microstructure; Optical device fabrication; Optical devices; Optical materials; Optical polymers; Optical refraction; Optical variables control; LF55GN; casting; flexopolymer; prism;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
  • Conference_Location
    Lyon
  • Print_ISBN
    1-4244-0841-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.2007.4300129
  • Filename
    4300129