• DocumentCode
    3373471
  • Title

    A new purely-experimental technique for extracting the spatial distribution of hot-carrier-induced interface states and trapped charges in MOSFETs

  • Author

    Leang, S.E. ; Chan, D.S.H. ; Chim, W.K.

  • Author_Institution
    Centre for Integrated Circuit Failure Anal. & Reliability, Nat. Univ. of Singapore, Singapore
  • fYear
    1996
  • fDate
    April 30 1996-May 2 1996
  • Firstpage
    311
  • Lastpage
    317
  • Abstract
    A new charge-pumping technique to extract the spatial distribution of hot-carrier-induced interface states and trapped charges in MOS devices is proposed. This method is purely experimental and does not require simulation, and therefore can be applied to any MOSFET without the detailed knowledge of the device´s structure. With this method, one is able to gain a better understanding of the degradation mechanisms taking place during hot-carrier stress.
  • Keywords
    MOSFET; electron traps; hot carriers; interface states; semiconductor device testing; MOS devices; MOSFETs; charge-pumping technique; degradation mechanisms; hot-carrier stress; hot-carrier-induced interface states; spatial distribution extraction; trapped charges; Charge carrier processes; Charge pumps; Degradation; Doping; Failure analysis; Hot carriers; Interface states; MOSFET circuits; Stress; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1996. 34th Annual Proceedings., IEEE International
  • Conference_Location
    Dallas, TX, USA
  • Print_ISBN
    0-7803-2753-5
  • Type

    conf

  • DOI
    10.1109/RELPHY.1996.492136
  • Filename
    492136