• DocumentCode
    3373843
  • Title

    Monolithic RF MEMS Probe Array System using RF MEMS SP3T Switches for Permittivity Measurement

  • Author

    Kim, Jung-Mu ; Kim, Namgon ; Park, Jae-Hyoung ; Cheon, Changyul ; Kwon, Youngwoo ; Kim, Yong-Kweon

  • Author_Institution
    Seoul Nat. Univ., Seoul
  • fYear
    2007
  • fDate
    10-14 June 2007
  • Firstpage
    663
  • Lastpage
    666
  • Abstract
    The monolithic RF MEMS probe array system for the application of permittivity measurement was firstly proposed and implemented. The proposed system consists of RF MEMS probe array and RF MEMS SP3T(single-pole triple-throw) switches. We succeeded to show the feasibility of the system for the permittivity measurement experimentally through the permittivity measurement of liquid as operating RF MEMS switches in turn.
  • Keywords
    MMIC; microswitches; permittivity measurement; SP3T switches; monolithic RF MEMS; permittivity measurement; probe array system; Bonding; Coaxial components; Dielectric substrates; Fabrication; Gold; Permittivity measurement; Probes; Radiofrequency microelectromechanical systems; Strips; Switches; RF MEMS probe system; RF MEMS switch; permittivity measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
  • Conference_Location
    Lyon
  • Print_ISBN
    1-4244-0842-3
  • Electronic_ISBN
    1-4244-0842-3
  • Type

    conf

  • DOI
    10.1109/SENSOR.2007.4300217
  • Filename
    4300217
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3373843