• DocumentCode
    3374016
  • Title

    Identification of electrically active non-visual defects in advanced devices

  • Author

    Bersuker, Gennadi

  • Author_Institution
    SEMATECH, Albany, NY, USA
  • fYear
    2012
  • fDate
    2-6 July 2012
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    It is demonstrated that a proposed microscopic description of the carrier transport in dielectrics, which takes into account an interaction of the charged carriers with the lattice, allows identifying structural defects contributing to a variety of electrical measurements.
  • Keywords
    MIS devices; dielectric materials; carrier transport; charged carrier interaction; dielectrics; electrical measurement; electrically active nonvisual defect identification; lattice; microscopic description; structural defect identification; Dielectrics; Electric variables measurement; Lattices; Logic gates; Object recognition; Semiconductor device measurement; Temperature measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits (IPFA), 2012 19th IEEE International Symposium on the
  • Conference_Location
    Singapore
  • ISSN
    1946-1542
  • Print_ISBN
    978-1-4673-0980-6
  • Type

    conf

  • DOI
    10.1109/IPFA.2012.6306329
  • Filename
    6306329
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3374016