Silicon NANO-ESI Emitters for Mass Spectrometry: A Mixed Micromechanical and Microfluidic Design

Author

Legrand, B. ; Buchaillot, L. ; Ashcroft, A.E. ; Arscott, S.

Author_Institution

Inst. d´´Electron. de Microelectronique et de Nanotechnologie, Villeneuve d´´Ascq

fYear

2007

fDate

10-14 June 2007

Firstpage

791

Lastpage

794

Abstract

We present nanoelectrospray ionization (nanoESI) emitter chips based on a microcapillary slot fabricated using silicon-on-insulator (SOI) technology. We combine microelectromechanical systems (MEMS) and microfluidic design rules to ensure the rigidity of the structures by taking into account the effect of capillary forces present following the introduction of liquids into MEMS. The optimized fabrication process enables cost-effective batch production of chip-based micromachined nanoESI emitter chips. The nanoESI emitter chips were tested using nanoESI-mass spectrometry.

Keywords

mass spectroscopy; microfluidics; silicon-on-insulator; capillary forces; mass spectrometry; microcapillary slot; microelectromechanical systems; microfluidic design; micromechanical design; nanoESI emitter chips; nanoelectrospray ionization emitters; silicon nanoESI emitters; silicon-on-insulator; Fabrication; Ionization; Liquids; Mass spectroscopy; Microelectromechanical systems; Microfluidics; Micromechanical devices; Optimized production technology; Silicon on insulator technology; Testing; MEMS; capillary forces; electrospraying; mass-spectrometry; microfluidics;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300249

Filename

4300249