An Investigation on a Vibration-Based Active Protein Desorption Mechanism for Implantable MEMS-Based Biosensor Applications

This paper presents for the first time an active protein desorption mechanism initiated by a MEMS vibrating membrane. Unlike conventional, passive biocompatible polymer coatings, active micromachined lead zircornate titanate (PZT) plate is used to generate an acoustic streaming force for minimizing the protein adsorption on a SiO₂ surface. Preliminary in vitro testing showed that 57plusmn10% of adsorbed bovine serum albumin (BSA) and 47plusmn13% of IgG were effectively removed from a vibrating surface. A simulation study on the vibration-frequency spectrum indicates the resonant frequency at 274 kHz matches well with the experimental data.