Title :
Innovative Structure for Mechanical Energy Scavenging
Author :
Despesse, G. ; Chaillout, J.J. ; Jager, T. ; Cardot, F. ; Hoogerwerf, A.
Author_Institution :
MINATEC, Grenoble
Abstract :
In this paper we present a new type of electrostatic conversion microstructure dedicated to mechanical energy scavenging: a multigap comb fingers microstructure fabricated thanks to a nickel electro forming process in a silicon sacrificial mould. This structure provides repeatable capacitance variations allowing higher global conversion efficiency up to 70-80 %, and lower operating voltages (<50 V) opening the path to the integration of the management electronics. A complete, few mm3 in size, vibration micro power supply based on electrostatic transduction is now just a feet away.
Keywords :
electroforming; electrostatic devices; micromechanical devices; electrostatic conversion microstructure; electrostatic transduction; management electronics; mechanical energy scavenging; multigap comb fingers microstructure; nickel electroforming process; silicon sacrificial mould; vibration micropower supply; Capacitance; Electrostatics; Fingers; Mechanical energy; Microstructure; Nickel; Power supplies; Silicon; Vibrations; Voltage; broadband vibrations energy scavenging; high efficiency electrostatic conversion;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300275
