A Novel RF Induced DC Power Supply System for Integrated Ubiquitous Micro Sensor Devices

Author

Sudou, Minoru ; Takao, Hidekuni ; Sawada, Kazuaki ; Ishida, Makoto

fYear

2007

fDate

10-14 June 2007

Firstpage

907

Lastpage

910

Abstract

In this paper, a novel radio frequency (RF) induced power supply system for micro sensor nodes is presented. Supplied power in RF-electromagnetic wave is received and rectified in each micro sensor device. A charge pump (CP) circuit boosts up an output voltage of the received power, and stores the energy in a large capacitor. When the boost up voltage of CP circuit reaches to an arbitrary voltage, a switch circuit turns on and supplies regulated DC voltage to loads through a voltage regulator. In the integrated power supply system, large value capacitances of surface mount device (SMD) are required to be integrated. Deep holes are fabricated by deep reactive ion etching (DRIE) for SMD mounting. It was confirmed that this system supplies well regulated 4.0 V/lmADC power to the load for 10 msec periodically.

Keywords

microsensors; power supply circuits; sputter etching; surface mount technology; voltage regulators; RF-electromagnetic wave; charge pump circuit; dc power supply system; deep reactive ion etching; integrated ubiquitous microsensor; microsensor nodes; radio frequency induced; surface mount device; switch circuit; voltage regulator; Capacitance; Charge pumps; Power supplies; Radio frequency; Regulators; Sensor systems; Switched capacitor circuits; Switches; Switching circuits; Voltage; Energy harvesting; MEMS; Micro generator; Power supply system; Ubiquitous sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300278

Filename

4300278