DocumentCode
3375468
Title
Work Place Monitoring using a High Sensitive Surface Acoustic Wave Based Sensor System
Author
Barié, N. ; Skrypnik, A. ; Voigt, A. ; Rapp, M. ; Marcoll, J.
Author_Institution
Inst. for Micro Struct. Technol., Karlsruhe
fYear
2007
fDate
10-14 June 2007
Firstpage
1003
Lastpage
1006
Abstract
Based on a self developed surface acoustic wave (SAW) based sensor system we present two interesting new approaches to use such gas systems for work place monitoring. As main component they contain a miniaturized SAW micro sensor array with a dramatic reduced sampling volume and inner surface area. This concept is kept very flexible to serve as a platform for a large variety of gas analytical tasks. Using a combination of different pre-concentrators, filters and gas fluidic networks for sampling the systems can be easily adapted towards very different tasks like the online monitoring of refrigerants at their hazardous levels of a few ppm´s or the detection of benzene at very low concentration levels even in the ppb range.
Keywords
gas sensors; sensor arrays; surface acoustic wave sensors; SAW micro sensor array; gas fluidic networks; gas systems; high sensitive surface acoustic wave based sensor system; reduced sampling volume; work place monitoring; Acoustic waves; Chemical sensors; Gas detectors; Monitoring; Refrigerants; Sampling methods; Sensor arrays; Sensor phenomena and characterization; Sensor systems; Surface acoustic waves; SAW; organic volatiles; polymers; sensor arrays; surface acoustic waves; work place monitoring;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300302
Filename
4300302
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