• DocumentCode
    3375468
  • Title

    Work Place Monitoring using a High Sensitive Surface Acoustic Wave Based Sensor System

  • Author

    Barié, N. ; Skrypnik, A. ; Voigt, A. ; Rapp, M. ; Marcoll, J.

  • Author_Institution
    Inst. for Micro Struct. Technol., Karlsruhe
  • fYear
    2007
  • fDate
    10-14 June 2007
  • Firstpage
    1003
  • Lastpage
    1006
  • Abstract
    Based on a self developed surface acoustic wave (SAW) based sensor system we present two interesting new approaches to use such gas systems for work place monitoring. As main component they contain a miniaturized SAW micro sensor array with a dramatic reduced sampling volume and inner surface area. This concept is kept very flexible to serve as a platform for a large variety of gas analytical tasks. Using a combination of different pre-concentrators, filters and gas fluidic networks for sampling the systems can be easily adapted towards very different tasks like the online monitoring of refrigerants at their hazardous levels of a few ppm´s or the detection of benzene at very low concentration levels even in the ppb range.
  • Keywords
    gas sensors; sensor arrays; surface acoustic wave sensors; SAW micro sensor array; gas fluidic networks; gas systems; high sensitive surface acoustic wave based sensor system; reduced sampling volume; work place monitoring; Acoustic waves; Chemical sensors; Gas detectors; Monitoring; Refrigerants; Sampling methods; Sensor arrays; Sensor phenomena and characterization; Sensor systems; Surface acoustic waves; SAW; organic volatiles; polymers; sensor arrays; surface acoustic waves; work place monitoring;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
  • Conference_Location
    Lyon
  • Print_ISBN
    1-4244-0842-3
  • Electronic_ISBN
    1-4244-0842-3
  • Type

    conf

  • DOI
    10.1109/SENSOR.2007.4300302
  • Filename
    4300302