Novel In-Plane Polarized PZT Film Based Ultrasonic Micro-Acoustic Device

Author

Zhu, Yi-Ping ; Ren, Tian-Ling ; Wang, Chao ; Wang, Zhe-Yao ; Liu, Li-Tian ; Li, Zhi-Jian

Author_Institution

Tsinghua Univ., Beijing

fYear

2007

fDate

10-14 June 2007

Firstpage

1291

Lastpage

1294

Abstract

This paper presents the design, fabrication and testing results of a novel in-plane polarized PZT film based micro-acoustic device for ultrasonic applications. The proposed micro-acoustic device with Pt/PZT/TiO₂/SiO₂ structure can be used for both microphone and microspeaker due to the piezoelectric effect and converse piezoelectric effect of PZT film. The PZT film is polarized along in-plane direction by top square ring shaped interdigitated (IDT) electrodes and works in d₃₃ mode. The fabricated d₃₃-mode micro-acoustic devices have good ultrasonic receiving and transmitting performance, and the resonance frequency is around 44 kHz.

Keywords

lead compounds; microphones; microsensors; piezoelectric thin films; piezoelectricity; platinum; silicon compounds; titanium compounds; ultrasonic applications; ultrasonic transducers; IDT electrodes; PZT; PZT film; Pt-PZT-TiO₂-SiO₂; in-plane polarization; interdigitated electrodes; microphone; microspeaker; piezoelectric effect; ultrasonic applications; ultrasonic micro-acoustic device; Acoustic applications; Electrodes; Fabrication; Microphones; Piezoelectric effect; Piezoelectric films; Piezoelectric polarization; Resonance; Resonant frequency; Testing; In-plane polarization; Interdigitated (IDT) electrodes; Lead zirconate titanate (PZT); Ultrasonic micro-acoustic device;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300374

Filename

4300374