Design and Fabrication of the High Directional Ultrasonic Ranging Sensor to Enhance the Spatial Resolution

Author

Lee, Haksue ; Kang, Daesil ; Moon, Wonkyu

Author_Institution

POSTECH, Pohang

fYear

2007

fDate

10-14 June 2007

Firstpage

1303

Lastpage

1306

Abstract

A new ultrasonic ranging transducer with high directionality is developed to enhance the spatial resolution in the pulse-echo measurement in air. The concept of the parametric transmitting array is applied to the design. A high-performance piezoelectric micro-machined ultrasonic transducer (pMUT) array is designed and fabricated in this study. The indirectly generated pulse has a beam-width of around 5deg and a sound pressure level (SPL) of over 85 dB at the peak. For a practical application, the higher sound pressure level should be achieved.

Keywords

acoustic intensity; acoustic parametric devices; micromachining; microsensors; piezoelectric transducers; ultrasonic measurement; ultrasonic transducer arrays; air pulse-echo measurement; high directional ultrasonic ranging sensor design; parametric transmitting array; piezoelectric micromachined ultrasonic transducer array fabrication; pulse generation; sound pressure level; spatial resolution enhancement; ultrasonic ranging transducer; Acoustic measurements; Acoustic transducers; Fabrication; Frequency; Piezoelectric transducers; Pulse measurements; Sensor arrays; Spatial resolution; Ultrasonic transducer arrays; Ultrasonic transducers; High Directional Ranging Sensor; Micro-machined Ultrasonic Transducer; Parametric Array;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300377

Filename

4300377