MEMS Tunable Coupled-Cavity Laser

Author

Cai, H. ; Zhang, X.M. ; Zhang, Q.X. ; Liu, A.Q.

Author_Institution

Nanyang Technol. Univ., Singapore

fYear

2007

fDate

10-14 June 2007

Firstpage

1441

Lastpage

1444

Abstract

This paper presents a MEMS based tunable coupled-cavity laser (CCL), which employs a deep-etched parabolic mirror to adjust the gap of the CCL for optimal phase match. In experiment, such mirror measures an initial coupling efficiency of 70.5% and a low variation (<5 %) of the efficiency even when the mirror is translated by 20 mum, which is ideal for the CCL to change the cavity length (i.e., phase condition) without deteriorating the optical coupling. Stable single-mode laser output over 6.5 nm is demonstrated. Compared with the traditional CCLs that have fixed air gap, this design offers an additional degree of freedom to adjust the CCL to its optimal tuning state.

Keywords

laser tuning; microcavity lasers; semiconductor lasers; MEMS tunable coupled-cavity laser; deep-etched parabolic mirror; Laser stability; Laser tuning; Length measurement; Micromechanical devices; Mirrors; Optical coupling; Optical frequency conversion; Optical tuning; Phase measurement; Tunable circuits and devices; Coupled-cavity lasers; MEMS; laser tuning; semiconductor lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300415

Filename

4300415