In-situ monitoring technique for growth of CdS layer by quartz crystal microbalance

Quartz Crystal Microbalance (QCM) was applied to chemical bath deposition (CBD) process to improve the controllability of the CdS deposition and to get more reproducible results. The frequency change measured by QCM during CdS deposition process was turned out to have linear relationship with thickness of the CdS thin films, while the traditional process parameters, i.e, deposition time and temperature, hardly showed systematic relation. These results demonstrated that the frequency change can be used as an in-situ monitoring mean for CdS deposition process.