Title :
Double-Cantilever Infrared Detector: Fabrication, Curvature Control and Demonstration of Thermal Detection
Author :
Huang, Shusen ; Tao, Hu ; Lin, I-Kuan ; Zhang, Xin
Author_Institution :
Boston Univ., Boston
Abstract :
This paper reports the recent progress on the development of double-cantilever infrared (IR) detectors, including the fabrication using a low-temperature surface micromachining module with two sacrificial layers of polyimide, the post-process curvature control using rapid thermal annealing (RTA), and also the first-time demonstration of thermal detection using capacitive-based IR FPAs.
Keywords :
cantilevers; infrared detectors; micromachining; rapid thermal annealing; double-cantilever infrared detector; low-temperature surface micromachining; postprocess curvature control; rapid thermal annealing; thermal detection; Biomedical optical imaging; Etching; Fabrication; Infrared detectors; Micromachining; Micromechanical devices; Plasma temperature; Polyimides; Radiation detectors; Thermal engineering; Curvature; Infrared detector; Surface micromachining; Thermal detection;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300454
