• DocumentCode
    3378304
  • Title

    Deposition phase diagram of micro-crystalline silicon and optical emission spectroscopy study in PECVD process

  • Author

    Sun, Zhenzhong ; Liu, Fengzhen ; Zhu, Meifang ; Zhou, Yuqin ; Zi, Wei ; Li, Chaowei

  • Author_Institution
    College of Physical Sciences, Graduate University, Chinese Academy of Sciences, Beijing, 100049, China
  • fYear
    2008
  • fDate
    11-16 May 2008
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    In this study, a deposition phase diagram was established based on the combinational variable of Pw/pg to denote the phase transition of the silicon thin films. The spatially resolved plasma emission profiles were measured to reveal the effect of PW/pg on the plasma emission. The influence of PW/pg and RH on the phase transition of silicon films was discussed.
  • Keywords
    Silicon; Spectroscopy; Stimulated emission;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference, 2008. PVSC '08. 33rd IEEE
  • Conference_Location
    San Diego, CA, USA
  • ISSN
    0160-8371
  • Print_ISBN
    978-1-4244-1640-0
  • Electronic_ISBN
    0160-8371
  • Type

    conf

  • DOI
    10.1109/PVSC.2008.4922570
  • Filename
    4922570
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3378304