DocumentCode
3378308
Title
3D Metal Microstructure Fabrication using a Molten Metal DoD Inkjet System
Author
Lee, Taik-Min ; Kang, Tae Goo ; Yang, Jeong-Soon ; Jo, Jeong-Dai ; Kim, Kwang-Young ; Choi, Byung-Oh ; Kim, Dong-Soo
Author_Institution
Korea Inst. of Machinery & Mater., Daejon
fYear
2007
fDate
10-14 June 2007
Firstpage
1637
Lastpage
1640
Abstract
In this paper, we present high aspect ratio 3D metal micro column and 65deg-inclined micro column made by molten metal DoD inkjet system. A design, fabrication and performance test of the DoD metal-jet system are introduced for application to the molten metal such as lead free solder. In the experimental test, we set up the test apparatus for visualization of the droplet ejection and measure the ejected droplet volume and velocity. As a result, the diameter, volume and the velocity of the ejected droplet are about 65 -70 mum, 145 -180 pi and 4 m/sec. Finally, we can fabricate vertical and inclined 3D micro column structures using the molten metal inkjet system. The measured geometries of the micro column structures are about height of more than 2,100 mum, diameter of 200 mum and aspect ratio of 10.5 for vertical micro column and l,400 mum of height and 150 mum of diameter for 65deg-inclined micro column, respectively.
Keywords
drops; ink; liquid metals; micromechanical devices; printing machinery; 3D metal microstructure fabrication; ejected droplet volume; molten metal DOD inkjet system; solder jet; Actuators; Fabrication; Microstructure; Solid state circuits; Transducers; Dod Injector; Inkjet; Metal-Jet; Molten Metal Droplet; Printing; Solder Jet;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300463
Filename
4300463
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